ICNEA 3562—Semiconductor device special equipment manufacturing

Where 3562 sits

1. C Manufacturing industry
2. 35 Special equipment manufacturing industry
3. 356 Manufacturing of special equipment for electronics and electrical machinery
4. 3562 Semiconductor device special equipment manufacturing

What 3562 includes

• Refers to the manufacture of equipment for the production of integrated circuits, diodes (including light-emitting diodes), triodes, and solar cells.
• Including the following semiconductor device special equipment manufacturing activities：
• Semiconductor material production equipment;
• Semiconductor-grade silicon single crystal growth, wafer cutting, grinding and polishing, cleaning equipment;
• Light-emitting diode crystal growth, wafer cutting, grinding and polishing, cleaning equipment;
• Solar-grade silicon single crystal growth, polysilicon growth, silicon wafer cutting and cleaning equipment;
• Integrated circuit production equipment;
• Integrated circuit wafer (chip) manufacturing equipment;
• Integrated circuit packaging and test equipment;
• Semiconductor discrete device production equipment;
• Diode, triode, high-power triode (IGBT) chip manufacturing equipment;
• Light-emitting diode (LED) chip manufacturing equipment;
• Special equipment for solar cells;
• Crystalline silicon solar cell manufacturing equipment;
• Thin film solar cell manufacturing equipment;
• Microelectromechanical system (MEMS) production equipment;
• The following product manufacturing activities are included in this category;
• Integrated circuit production line equipment;
• IGBT production line equipment;
• LED production line equipment;
• Crystal growth and wafer manufacturing and processing equipment;
• Special lithography machine for production (used in 6-inch/8-inch/12-inch integrated circuit production lines);
• Etching machine;
• Ion implantation machine;
• Annealing equipment;
• Single crystal growth equipment;
• Film growth equipment;
• Chemical mechanical polishing equipment;
• Solar-grade polysilicon production equipment;
• Monocrystalline silicon drawing equipment;
• Automation integrated chip interconnection equipment;
• Multi-wire cutting equipment;
• Photovoltaic cell packaging materials;
• Inductively coupled plasma (ICP) etching machine chip;
• Organic light-emitting diode (OLED) material production equipment;
• Organic light-emitting diode (OLED) device production equipment;
• Organic light-emitting diode (OLED) lighting product production equipment.

What 3562 excludes

• Vacuum pump equipment manufacturing, included in 3441 (pump and vacuum equipment manufacturing);
• General equipment manufacturing, included in 34 (General equipment manufacturing) related industry categories;
• Electronic special mold manufacturing, included in 3525 (mold manufacturing).

3562 in other systems